Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535938 | Shower head assembly and atomic layer deposition device | Jing-Cheng Lin, CHING-LIANG YI | 2022-12-27 |
| 11401608 | Atomic layer deposition equipment and process method | Jing-Cheng Lin, CHING-LIANG YI, Hsin-Yu Yao | 2022-08-02 |