Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495481 | EFEM | Gengoro Ogura | 2022-11-08 |
| 11447021 | Vehicle control apparatus, control method, non-transitory storage medium, and vehicle | Shinichi Inoue, Toru Ono, Yasushi Kusaka | 2022-09-20 |
| 11424145 | Transfer chamber | Takashi Shigeta, Munekazu Komiya, Yasushi Taniyama | 2022-08-23 |
| 11322378 | Equipment front end module | Gengoro Ogura | 2022-05-03 |