Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495481 | EFEM | Toshihiro Kawai | 2022-11-08 |
| 11322378 | Equipment front end module | Toshihiro Kawai | 2022-05-03 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495481 | EFEM | Toshihiro Kawai | 2022-11-08 |
| 11322378 | Equipment front end module | Toshihiro Kawai | 2022-05-03 |