Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11315839 | Evaluation method and manufacturing method of SiC epitaxial wafer | Koji Kamei | 2022-04-26 |
| 11249027 | SiC substrate evaluation method and method for manufacturing SiC epitaxtal wafer | Koji Kamei | 2022-02-15 |