Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322384 | Substrate processing apparatus and substrate processing method | Shunya Kubota, Emi Matsui, Katsuhiro Yamazaki, Yoshikazu Ohtani | 2022-05-03 |
| 11251058 | Workpiece-separating device and workpiece-separating method | Yoshikazu Ohtani | 2022-02-15 |