EM

Emi Matsui

SM Shibaura Mechatronics: 1 patents #2 of 13Top 20%
SC Shin-Etsu Engineering Co.: 1 patents #3 of 5Top 60%
Overall (2022): #464,237 of 548,613Top 85%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11322384 Substrate processing apparatus and substrate processing method Shunya Kubota, Katsuhiro Yamazaki, Yoshikazu Ohtani, Kyouhei TOMIOKA 2022-05-03