Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322384 | Substrate processing apparatus and substrate processing method | Shunya Kubota, Katsuhiro Yamazaki, Yoshikazu Ohtani, Kyouhei TOMIOKA | 2022-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11322384 | Substrate processing apparatus and substrate processing method | Shunya Kubota, Katsuhiro Yamazaki, Yoshikazu Ohtani, Kyouhei TOMIOKA | 2022-05-03 |