Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340527 | Resist composition and patterning process | Shinya Yamashita, Masaki Ohashi, Takayuki Fujiwara | 2022-05-24 |
| 11262653 | Sulfonium salt, polymer, resist composition, and patterning process | Masaki Ohashi, Jun Hatakeyama | 2022-03-01 |