Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524315 | Support unit, substrate treating apparatus including the same, and substrate treating method using the substrate treating apparatus | Jaeoh BANG, Youngseo AN | 2022-12-13 |
| 11340533 | Substrate treating apparatus and substrate treating method | Min Jung Park, Jung Yul Lee, Choongki Min | 2022-05-24 |