Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11524315 | Support unit, substrate treating apparatus including the same, and substrate treating method using the substrate treating apparatus | Kyungjin SEO, Youngseo AN | 2022-12-13 |
| 11404293 | Cooling unit and substrate treating apparatus including the same | — | 2022-08-02 |
| 11320752 | Supporting unit and substrate processing apparatus including the same | — | 2022-05-03 |