Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424139 | Apparatus and method for treating substrate, and nozzle unit | Yong Hoon HONG, Ji-Young Lee | 2022-08-23 |
| 11280753 | Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor | Daesung Jung, Jiyoung Lee, Jongmin Song, Sangyoon Soh | 2022-03-22 |