Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11280753 | Sensors for detecting substitution between chemicals and methods of manufacturing a semiconductor device using the sensor | Heehwan Kim, Jiyoung Lee, Jongmin Song, Sangyoon Soh | 2022-03-22 |