Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421319 | Plasma etch-resistant film and a method for its fabrication | Pekka Soininen, Vasil Vorsa | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421319 | Plasma etch-resistant film and a method for its fabrication | Pekka Soininen, Vasil Vorsa | 2022-08-23 |