Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11421319 | Plasma etch-resistant film and a method for its fabrication | Vasil Vorsa, Mohammad Ameen | 2022-08-23 |
| RE48871 | Method and apparatus for depositing thin films on a surface | Sven Lindfors | 2022-01-04 |