Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521865 | Substrate processing method and substrate processing device | Hiroki Tsujikawa, Masato Tanaka, Tsuyoshi Okumura, Atsuyasu Miura, Makoto Takaoka +4 more | 2022-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521865 | Substrate processing method and substrate processing device | Hiroki Tsujikawa, Masato Tanaka, Tsuyoshi Okumura, Atsuyasu Miura, Makoto Takaoka +4 more | 2022-12-06 |