Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521865 | Substrate processing method and substrate processing device | Masato Tanaka, Tsuyoshi Okumura, Atsuyasu Miura, Makoto Takaoka, Nobuyuki Miyaji +4 more | 2022-12-06 |
| 11439967 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takashi Izuta, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto +4 more | 2022-09-13 |