Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538708 | Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same | Shoichi Murakami, Shigeru NAKATSUKA, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2022-12-27 |