Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501928 | MEMS device built on substrate with ruthenium based contact surface material | Andrew Minnick, Christopher Fred Keimel | 2022-11-15 |
| 11333789 | System and inspection method | Haruka Obata | 2022-05-17 |