Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11501928 | MEMS device built on substrate with ruthenium based contact surface material | Andrew Minnick, Xu Zhu | 2022-11-15 |
| 11326883 | Inertial sensing systems and methods of manufacturing the same | Sergey Alexandrovich Zotov, Todd F. Miller, Yizhen Lin | 2022-05-10 |