Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508557 | Semiconductor manufacturing apparatus having an insulating plate | Jeon Il Lee, Kaoru Yamamoto, Jang-Hee Lee, Kee-Young Jun, Geun-O Jeong | 2022-11-22 |
| 11270881 | Plasma deposition method, plasma deposition apparatus and method of manufacturing semiconductor device | Kaoru Yamamoto, Chang Hyun Kim, Hyun-jae Song, Keun Wook SHIN, Hyeon Jin Shin +4 more | 2022-03-08 |