Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270881 | Plasma deposition method, plasma deposition apparatus and method of manufacturing semiconductor device | Kaoru Yamamoto, Chang Hyun Kim, Hyun-jae Song, Hyeon Jin Shin, Sung-Joo An +4 more | 2022-03-08 |