Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339467 | Sputtering apparatus and method for fabricating semiconductor device using the same | Ki Woong Kim, Hyeon Woo Seo, Hee-Ju Shin, Hyun-Jin Cho | 2022-05-24 |
| 11293091 | Substrate processing apparatus | Joon-Myoung Lee, Yong-Sung Park, Whan-Kyun Kim, Young-man JANG | 2022-04-05 |
| 11271037 | Data storage devices including a first top electrode and a different second top electrode thereon | Junghwan Park, Younghyun Kim, Jungmin Lee, Kyungil Hong | 2022-03-08 |