Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339467 | Sputtering apparatus and method for fabricating semiconductor device using the same | Ki Woong Kim, Hyeon Woo Seo, Se-Chung Oh, Hyun-Jin Cho | 2022-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11339467 | Sputtering apparatus and method for fabricating semiconductor device using the same | Ki Woong Kim, Hyeon Woo Seo, Se-Chung Oh, Hyun-Jin Cho | 2022-05-24 |