Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493849 | Anti-reflective hardmask composition | Wanuk Kim | 2022-11-08 |
| 11348802 | Dry etching apparatus | Ji Sung Kang, Kyung-Jin Lee | 2022-05-31 |
| 11348810 | Dry etching device and method for controlling same | Ji Sung Kang | 2022-05-31 |
| 11244557 | Emergency and exigency situation notification system | — | 2022-02-08 |