Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348802 | Dry etching apparatus | Sang-jun Choi, Kyung-Jin Lee | 2022-05-31 |
| 11348810 | Dry etching device and method for controlling same | Sang-jun Choi | 2022-05-31 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11348802 | Dry etching apparatus | Sang-jun Choi, Kyung-Jin Lee | 2022-05-31 |
| 11348810 | Dry etching device and method for controlling same | Sang-jun Choi | 2022-05-31 |