Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372323 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Seongsue Kim, Taehoon Lee | 2022-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372323 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Seongsue Kim, Taehoon Lee | 2022-06-28 |