Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487197 | Phase shift masks for extreme ultraviolet lithography | Seongsue Kim, Dongwan KIM | 2022-11-01 |
| 11372323 | Phase-shift mask for extreme ultraviolet lithography | Seongsue Kim, Taehoon Lee, Roman Chalykh | 2022-06-28 |