Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476151 | Vacuum chuck, substrate processing apparatus including the same and related method of manufacture | Byounghoon Ji, Seoyoung Maeng, Jongyong Bae, Jiho Uh, Hongtaek Lim +1 more | 2022-10-18 |
| 11220748 | Gas supply and layer deposition apparatus including the same | Donghoon Han, Seoyoung Maeng, Byounghoon Ji, Jongyong Bae, Kyuho Lee | 2022-01-11 |