Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476151 | Vacuum chuck, substrate processing apparatus including the same and related method of manufacture | Byounghoon Ji, Seoyoung Maeng, Minjoon Kim, Jongyong Bae, Jiho Uh +1 more | 2022-10-18 |