Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11490499 | Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same | Sungho Jang, Yoonjae Kim, Hyuck Shin, Donghyub Lee | 2022-11-01 |