Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11490499 | Method of exposure using extreme ultraviolet and method of manufacturing a semiconductor device using the same | Sungho Jang, Yoonjae Kim, Donghyub Lee, Kul Inn | 2022-11-01 |
| 11217495 | X-ray system, semiconductor package, and tray having X-ray absorption filter | Sang-Young Kim, Kyung-Soo Rho, Ho-Jeong Moon, SUN-NYEONG JUNG | 2022-01-04 |