Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493850 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Changyoung Jeong, Byunggook Kim, Maenghyo Cho, Muyoung Kim +3 more | 2022-11-08 |