Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493850 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more | 2022-11-08 |
| 11448957 | Pellicle transfer apparatus and method | Mun Ja Kim | 2022-09-20 |
| 11262648 | Pellicle for photomask and method of fabricating the same | Mun Ja Kim | 2022-03-01 |