Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415889 | Chemical supply structure and a developing apparatus having the same | Kyoung-Noh Kim, Man Kyu Kang, Byung-Gook Kim | 2022-08-16 |
| 11302540 | Substrate support device and substrate cleaning device including the same | Kyeong Bin Lim, Byung-Gook Kim | 2022-04-12 |