Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415889 | Chemical supply structure and a developing apparatus having the same | Jong-Keun Oh, Kyoung-Noh Kim, Man Kyu Kang | 2022-08-16 |
| 11381388 | Storage device sharing data encryption key as encrypted and operating method of storage device | Hyunsook Hong, Jintaek Kwon, Myeongjong Lee, Seung Jae Lee, Seokgi Hong +1 more | 2022-07-05 |
| 11302540 | Substrate support device and substrate cleaning device including the same | Jong-Keun Oh, Kyeong Bin Lim | 2022-04-12 |