Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466985 | Rotation-rate sensor, method for producing a rotation-rate sensor | Jan-Timo Liewald, Andreas Lassl, Burkhard Kuhlmann, Niels Bode, Nils Felix Kuhlmann +3 more | 2022-10-11 |
| 11421991 | Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor | Andreas Lassl, Burkhard Kuhlmann, Jan-Timo Liewald, Niels Bode, Nils Felix Kuhlmann +2 more | 2022-08-23 |
| 11417552 | Method and device for determining a feature for devices produced on a wafer | Christoph Zimmer, Dusan Radovic, Eric Sebastian Schmidt, Michael Herman, Wenqing Liu +1 more | 2022-08-16 |
| 11365969 | MEMS device including spurious mode suppression and corresponding operating method | Andreas Lassl, Niels Bode, Nils Felix Kuhlmann, Peter Degenfeld-Schonburg, Reinhard Neul +1 more | 2022-06-21 |
| 11226202 | Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units | Odd-Axel Pruetz, Andreas Lassi, Burkhard Kuhlmann, Jan-Timo Liewald, Niels Bode +3 more | 2022-01-18 |