Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466985 | Rotation-rate sensor, method for producing a rotation-rate sensor | Jan-Timo Liewald, Burkhard Kuhlmann, Matthias Kuehnel, Niels Bode, Nils Felix Kuhlmann +3 more | 2022-10-11 |
| 11421991 | Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor | Burkhard Kuhlmann, Jan-Timo Liewald, Matthias Kuehnel, Niels Bode, Nils Felix Kuhlmann +2 more | 2022-08-23 |
| 11365969 | MEMS device including spurious mode suppression and corresponding operating method | Matthias Kuehnel, Niels Bode, Nils Felix Kuhlmann, Peter Degenfeld-Schonburg, Reinhard Neul +1 more | 2022-06-21 |