Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505864 | Adjustable fluid inlet assembly for a substrate processing apparatus and method | Timo Malinen, Marko PUDAS | 2022-11-22 |
| 11414758 | Sample protection | Juhana Kostamo, Riina RITASALO | 2022-08-16 |
| 11280001 | Substrate loading in an ALD reactor | Juhana Kostamo, Wei Li | 2022-03-22 |