Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11414758 | Sample protection | Vaino Kilpi, Riina RITASALO | 2022-08-16 |
| 11326254 | Protecting an interior of a gas container with an ALD coating | Väino Sammelselg, Willi Bayerl, Jaan Aarik, Lauri Aarik, Sven Lindfors +2 more | 2022-05-10 |
| 11280001 | Substrate loading in an ALD reactor | Vaino Kilpi, Wei Li | 2022-03-22 |