Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491517 | Method and system for cleaning copper-exposed substrate | Daisaku Yano, Masami Murayama, Koji Yamanaka | 2022-11-08 |
| 11408868 | Measuring system and measuring method of hydrogen peroxide concentration | Shota Morino, Daisaku Yano, Masayuki Kawakami | 2022-08-09 |
| 11229887 | Ozone water supply method and ozone water supply device | Yoshifumi HAYASHI, Koji Yamanaka | 2022-01-25 |