Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11491517 | Method and system for cleaning copper-exposed substrate | Masami Murayama, Yukinari Yamashita, Koji Yamanaka | 2022-11-08 |
| 11408868 | Measuring system and measuring method of hydrogen peroxide concentration | Shota Morino, Yukinari Yamashita, Masayuki Kawakami | 2022-08-09 |