Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417495 | Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus | Kazuhiko Inoue, Masataka Shiratsuchi | 2022-08-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417495 | Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus | Kazuhiko Inoue, Masataka Shiratsuchi | 2022-08-16 |