Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11417495 | Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus | Kazuhiko Inoue, Munehiro Ogasawara | 2022-08-16 |
| 11385192 | Inspection apparatus and inspection method | Riki Ogawa, Hiromu Inoue | 2022-07-12 |