Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11483901 | Ceramic heater | — | 2022-10-25 |
| 11367631 | Ceramic heater and manufacturing method for tubular shaft | — | 2022-06-21 |
| 11223302 | Electrostatic chuck having an annular outer region covered by an insulating film | Reo WATANABE, Nobuyuki Kondou | 2022-01-11 |