Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11223302 | Electrostatic chuck having an annular outer region covered by an insulating film | Nobuyuki Kondou, Yutaka Unno | 2022-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11223302 | Electrostatic chuck having an annular outer region covered by an insulating film | Nobuyuki Kondou, Yutaka Unno | 2022-01-11 |