Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11456189 | Member for semiconductor manufacturing apparatuses | Kazuma Ohba, Tetsuya Kawajiri | 2022-09-27 |
| 11282734 | Electrostatic chuck and method for manufacturing the same | Tatsuya KUNO, Ikuhisa Morioka, Kenichiro AIKAWA | 2022-03-22 |