Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282734 | Electrostatic chuck and method for manufacturing the same | Tatsuya KUNO, Takashi Kataigi, Kenichiro AIKAWA | 2022-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11282734 | Electrostatic chuck and method for manufacturing the same | Tatsuya KUNO, Takashi Kataigi, Kenichiro AIKAWA | 2022-03-22 |