Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11479744 | Composition having suppressed alumina damage and production method for semiconductor substrate using same | Toshiyuki Oie, Akinobu HORITA, Kenji Yamada | 2022-10-25 |
| 11441109 | Cleaning solution for removing dry etching residue and method for manufacturing semiconductor substrate using same | Hiroaki Horie, Kimihiro AOYAMA, Nobuo Tajima | 2022-09-13 |
| 11352593 | Aqueous composition and cleaning method using same | Akinobu HORITA, Toshiyuki Oie, Kenji Yamada | 2022-06-07 |