Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11441109 | Cleaning solution for removing dry etching residue and method for manufacturing semiconductor substrate using same | Takahiro Kikunaga, Hiroaki Horie, Kimihiro AOYAMA | 2022-09-13 |