Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314168 | Underlayer for photoresist adhesion and dose reduction | Jun Xue, Mary Anne Manumpil, Jengyi Yu, Da Li | 2022-04-26 |
| 11257674 | Eliminating yield impact of stochastics in lithography | Nader Shamma, Richard Wise, Jengyi Yu | 2022-02-22 |