DL

Da Li

Lam Research: 1 patents #75 of 246Top 35%
Overall (2022): #481,898 of 548,613Top 90%
1
Patents 2022

Issued Patents 2022

Patent #TitleCo-InventorsDate
11314168 Underlayer for photoresist adhesion and dose reduction Samantha Tan, Jun Xue, Mary Anne Manumpil, Jengyi Yu 2022-04-26