Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314168 | Underlayer for photoresist adhesion and dose reduction | Samantha Tan, Jun Xue, Mary Anne Manumpil, Jengyi Yu | 2022-04-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11314168 | Underlayer for photoresist adhesion and dose reduction | Samantha Tan, Jun Xue, Mary Anne Manumpil, Jengyi Yu | 2022-04-26 |